Figure 3

(a)
(b)
Figure 3.
a) SEM picture of an NHEB power detector structure. The  structure is fabricated by e-beam lithography and shadow metal evaporation from different angles. The absorber strip is made of normal metal (copper) and has dimensions 5x0.25x0.07 mm3.  At right: Schematic diagram of the NHEB.
b) Electrical NEP of the sensor as function of frequency measured at three substrate temperatures.